Southern Emergency Response Training and Logistics Center

Semiconductor fabrication is one of the key industries in Taiwan. The semiconductor fabrication processes use a wide variety of specialty gases/liquids which are corrosive, toxic, flammable, pyrophoric, water reactive, etc., and all pose high risk potential to the personnel and environment upon leak.

However, there is no ER training module for these specialty gases/liquids in Taiwan or other countries. SERT started to develop this ER module based on existing Specialty Gas/Liquid Delivery System currently used by the semiconductor industries. The module includes automatic cycle purge, leak check, safety interlocks, gas/flame/smoke detectors, ventilation, scrubber, etc., in the original delivery system, plus controllable leak points and real, diluted gas to simulate the leak.

“Semiconductor Specialty Gases/Liquids Delivery System ER Training Module” provide realistic scenarios of leakage inside the delivery system such as alarms of gas detected, fire detected, automatic interlock system. The module provides ER training for using detectors or other methods to find out the leakage, stop leaking or block the valve, safely disconnect and contain the cylinders.